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DIAMOND-LIKE CARBON THIN FILM CONTAINING SILICON, PREPARATION METHOD THEREOF, AND USE THEREOF
DIAMOND-LIKE CARBON THIN FILM CONTAINING SILICON, PREPARATION METHOD THEREOF, AND USE THEREOF
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机译:含硅的类金刚石薄膜,其制备方法及用途
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摘要
A silicon-incorporated diamond-like carbon thin film, a fabrication method thereof, and its use are disclosed. The silicon-incorporated diamond-like carbon thin film comprises a chemical bond between carbon and silicon atoms present on a surface of the silicon-incorporated diamond-like carbon thin film comprising silicon incorporated within and on the surface thereof with an atom providing hydrophilicity to the surface of the thin film on the surface of the thin film.
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