A tissue infiltration apparatus, system and method are described, allowing accelerating infiltration of the tissue sample with a variety of reagents fluids. The apparatus comprises a reaction chamber adapted to receive a tissue sample and a dielectric fluid to be infiltrated into a tissue sample. The reaction chamber comprises a bottom and a circumferential wall with a window section that is transparent for microwave irradiation. A holding element holds the tissue sample over a predetermined time period at a distance of 3PD of the dielectric fluid from the window section is provided. PD is the penetration depth of the microwaves into the dielectric fluid and defined as the depth where the initial microwave field intensity has been reduced to 1/e. A microwave system irradiates microwave irradiation through the window section into the reaction chamber.
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