首页> 外国专利> THREE-DIMENSIONAL MICRO-STRUCTURE, ARRANGEMENT WITH AT LEAST TWO THREE-DIMENSIONAL MICRO-STRUCTURES, METHOD FOR PRODUCING THE MICRO-STRUCTURE AND USE OF THE MICRO-STRUCTURE

THREE-DIMENSIONAL MICRO-STRUCTURE, ARRANGEMENT WITH AT LEAST TWO THREE-DIMENSIONAL MICRO-STRUCTURES, METHOD FOR PRODUCING THE MICRO-STRUCTURE AND USE OF THE MICRO-STRUCTURE

机译:三维微结构,至少具有二维微结构的排列,微结构的生产方法和使用

摘要

A three-dimensional micro-structure has a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension. The micro-columns are made of at least one micro-column material having respectively an aspect ratio in the region of 20-1000 and respectively a micro-column diameter in the region of 0.1 μm-200 μm. A micro-column intermediate chamber is arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 μm-100 μm. According to a method for producing the three-dimensional micro-structures: a) a template is provided with template material, b) the micro-column material is arranged in the column-like cavities, and c) the template is at least partially removed.
机译:三维微结构具有多个相邻的微柱,它们彼此间隔一定距离并且相对于各自的纵向延伸基本平行。所述微柱由至少一种微柱材料制成,所述微柱材料具有分别在20-1000的范围内的长宽比和在0.1μm-200μm的范围内的微柱直径。微柱中间腔室布置在相邻的微柱之间,该微柱中间腔具有从相邻的微柱之间选择的微柱距离在1μm-100μm的区域中。根据一种用于制造三维微结构的方法:a)为模板提供模板材料,b)将微柱材料设置在圆柱状空腔中,以及c)至少部分去除模板。

著录项

  • 公开/公告号EP2483198A2

    专利类型

  • 公开/公告日2012-08-08

    原文格式PDF

  • 申请/专利权人 SIEMENS AKTIENGESELLSCHAFT;

    申请/专利号EP20100760290

  • 发明设计人 ZAPF JOERG;HEDLER HARRY;

    申请日2010-09-20

  • 分类号B81C99/00;

  • 国家 EP

  • 入库时间 2022-08-21 17:12:05

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