THREE-DIMENSIONAL MICRO-STRUCTURE, ARRANGEMENT WITH AT LEAST TWO THREE-DIMENSIONAL MICRO-STRUCTURES, METHOD FOR PRODUCING THE MICRO-STRUCTURE AND USE OF THE MICRO-STRUCTURE

摘要

The invention relates to a three-dimensional micro-structure comprising a plurality of adjacent micro-columns which are arranged at a distance from each other and essentially parallel in relation to the respective longitudinal extension, said micro¬columns being made of at least one micro-column material having respectively an aspect ratio in the region of 20 -1000 and respectively a micro-column diameter in the region of 0,1 µm - 200 µm, and a micro-column intermediate chamber arranged between adjacent micro-columns having a micro-column distance selected from between the adjacent micro-columns in the region of 1 µm -100 µm. The invention also relates to a method for producing the three-dimensional micro-structures according to the following steps: a) a template is provided with template material, said template having a three-dimensional structure with column-like template cavities essentially inverse for the micro-structure, b) the micro-column material is arranged in the column-like cavities such that the micro-columns are formed, and c) the template material is at least partially removed. A silicon wafer is preferably used as the template. In order to provide the template, the PAECE (Photo Assisted Electro-Chemical Etching) method is used. Said invention enables micro-structures with extremely large surfaces to be produced.