首页> 外国专利> CONNECTION APPARATUS FOR A CHEMICAL SOLUTION FLOW PATH FOR CONTROLLING THE LEAKAGE OF THE CHEMICAL SOLUTION IN THE SEPARATION OF A CHEMICAL SOLUTION FLOW PATH

CONNECTION APPARATUS FOR A CHEMICAL SOLUTION FLOW PATH FOR CONTROLLING THE LEAKAGE OF THE CHEMICAL SOLUTION IN THE SEPARATION OF A CHEMICAL SOLUTION FLOW PATH

机译:化学溶液流路的连接装置,用于控制分离化学溶液流路时的化学溶液泄漏

摘要

PURPOSE: A connection apparatus for a chemical solution flow path is provided to control the mixing of a chemical solution in the change over of a flow path by closing a first opening and a second opening which are formed in a first valve body chamber.;CONSTITUTION: A connection apparatus(11) for a chemical solution flow path includes a first connecting unit and a second connecting unit. The first connecting unit(10a) comprises a first chemical solution valve room(38a), a first valve body, and a penetration solution supply controlling valve. The first drug liquid valve room is connected with the first chemical solution flow path, a first connecting flow path, and a penetration solution supply flow path. The first valve opens and closes a first chemical solution opening which is simultaneously communicated with the first chemical solution flow path and is formed in the first inner wall surface of the first chemical solution valve room. The second connecting unit comprises a second chemical solution valve room, a second valve body, and a penetration slolution discharge controlling valve.;COPYRIGHT KIPO 2012
机译:目的:提供一种用于化学溶液流路的连接装置,以通过关闭形成在第一阀体腔中的第一开口和第二开口来控制流路转换中化学溶液的混合。 :化学溶液流路的连接装置(11)包括第一连接单元和第二连接单元。第一连接单元(10a)包括第一药液阀室(38a),第一阀体和渗透液供给控制阀。第一药液阀室与第一药液流路,第一连接流路和渗透液供给流路连接。第一阀打开和关闭第一化学溶液开口,该第一化学溶液开口同时与第一化学溶液流路连通并且形成在第一化学溶液阀室的第一内壁表面中。第二连接单元包括第二化学溶液阀室,第二阀体和渗透污泥排放控制阀。; COPYRIGHT KIPO 2012

著录项

  • 公开/公告号KR20110127076A

    专利类型

  • 公开/公告日2011-11-24

    原文格式PDF

  • 申请/专利权人 CKD CORPORATION;

    申请/专利号KR20110046027

  • 发明设计人 ITAFUJI HIROSHI;KOUKETSU MASAYUKI;

    申请日2011-05-17

  • 分类号H01L21/302;

  • 国家 KR

  • 入库时间 2022-08-21 17:11:38

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