APPARATUS FOR INSPECTING A FLAT PANEL CAPABLE OF INSPECTING THE FAULTY ELEMENT FORMED IN A FLAT PANEL AND ON THE SURFACE OF A FLAT PANEL

摘要

PURPOSE: An apparatus for inspecting a flat panel is provided to accurately sense a deformation portion which is formed inside a flat panel by eliminating a glittering phenomenon on the surface of a flat panel.;CONSTITUTION: A flat panel inspection apparatus makes light be incident into a flat panel(101). An inspection apparatus(100) inspects the flat panel by reflecting reflected light with a retro reflecting plate(103). One or more light sources(105, 106) emits the light to the flat panel. An imaging lens group is arranged between the flat panel and the imaging unit. The imaging lens group consists of one or more imaging lenses.;COPYRIGHT KIPO 2012