Highly dense PZT-PMnN piezoelectic thick film and preparation method thereof

摘要

The present invention relates to a piezoelectric PZT-PMnN dense thick film and a method, in particular the surface of the substrate Pb with a perovskite-like on one side (Zr, Ti) O ₃ and Pb (Mn _1/3 Nb _2/3 ) O ₃ of the solid solution composed of piezoelectric material to a room temperature vacuum powder spraying (Room Temperature Powder Spray in Vacuum) by vacuum deposition and a method of manufacturing a piezoelectric thick film is about. According to the present invention, at room temperature using a vacuum spraying powder having a perovskite phase, and tightly film formation at a high density, cracking or pore formation is not present and the thickness of more than 5 sound to a substrate without peeling from the substrate is attached, it is possible to manufacture a piezoelectric thick film PZT-PMnN showing a piezoelectric sensor and piezoelectric properties of the equivalent bulk is conventionally used, the thin film in the electronic products in the trend of frivolous digestion stage / may be applied to a thick film-type piezoelectric sensor.