SURFACE FUNCTIONALIZED SILICA NANOFILLERS, PLASMA-RESISTANT FLUOROELASTOMER COMPOSITION CONTANING THE SAME, MOLDED ARTICLE AND SEALING MATERIAL FOR SEMICONDUCTOR MANUFACTURING APPARATUS USING THE SAME

摘要

PURPOSE: A silica nanofiller, a plasma-resistance fluororubber composition containing thereof, a molded product thereof, and a sealing material for a semiconductor manufacturing apparatus are provided to offer the excellent the plasma-resistance of the silica nanofiller to the fluororubber composition. CONSTITUTION: A silica nanofiller contains silica nanoparticles having the functionalized surface by more than two kinds of alkylsilane marked with chemical formula 1: CH_3-(CH_2)_a_b-Si-X_c. In the chemical formula 1, X is halogen or C1-6 alkoxy, and a is a number selected from 0-20. b and c in the chemical formula are 1, 2 or 3, independently.