SURFACE FUNCTIONALIZED SILICA NANOFILLERS, PLASMA-RESISTANT FLUOROELASTOMER COMPOSITION CONTANING THE SAME, MOLDED ARTICLE AND SEALING MATERIAL FOR SEMICONDUCTOR MANUFACTURING APPARATUS USING THE SAME

摘要

The present application relates to a silica nanofiller having a functionalized surface, a plasma resistant fluororubber composition comprising the same, and a sealing material for sealing a molded article and a semiconductor manufacturing device using the fluorine rubber composition, the surface comprising a silica nanofiller functionalized. When the plasma resistant fluororubber composition is used as a sealing material for sealing a semiconductor manufacturing apparatus, it is possible to improve the plasma resistance of the sealing material and to improve the problems of the existing sealing material due to aggregation and separation of nanoparticle fillers.