FLEXIBLE MICRO SYSTEM STRUCTURE FOR BEING FORMED BY MATCHING A MULTICHIP/SINGLE CHIP WITH A FLEXIBLE MATERIAL AND A METHOD MANUFACTURING THEREOF

摘要

PURPOSE: A flexible micro system structure and a method manufacturing thereof are provided to be widely applied to a high frequency application field, a biological medicine field, and a flexible display by increasing the flexibility of a process.;CONSTITUTION: A sacrificial layer is formed on a control substrate(10). A flexible substrate(12) is formed on the sacrificial layer. A first conductive structure(13) is formed on the flexible substrate. One or more electronic components(20), in which a second conductive structure corresponding to the first conductive structure is installed, is prepared. The electronic component is fixed to the flexible substrate.;COPYRIGHT KIPO 2012