首页>
外国专利>
ELECTRONICS MOLDING DEVICE OF A SILICON INGOT WHICH MANUFACTURES AN INGOT OF HIGH QUALITY WITHOUT THE DEGRADATION OF PRODUCTION YIELD
ELECTRONICS MOLDING DEVICE OF A SILICON INGOT WHICH MANUFACTURES AN INGOT OF HIGH QUALITY WITHOUT THE DEGRADATION OF PRODUCTION YIELD
展开▼
机译:硅锭的电子成型装置,其生产高质量的锭而不会降低产量
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: An electronics molding device of a silicon ingot is provided to secure uniformity of a crystal of the transverse section of an ingot and to prevent the degradation of product yield.;CONSTITUTION: A radiation thermometer(16) is installed outside a monitoring window(15). The monitoring window is arranged to be faced to two sides(3a, 3b) which are parallel each other among fourth sides of an ingot(3). An insulating material(17) is inserted between the upper side of an after heater(9) and the lower side of a cooled crucible(7). A through hole(18a) is formed in a site which faces to a center part of each side of the ingot. A back mirror(19) is installed on the outer side of the through hole of the insulating material.;COPYRIGHT KIPO 2012
展开▼