首页> 外国专利> ELECTRONICS MOLDING DEVICE OF A SILICON INGOT WHICH MANUFACTURES AN INGOT OF HIGH QUALITY WITHOUT THE DEGRADATION OF PRODUCTION YIELD

ELECTRONICS MOLDING DEVICE OF A SILICON INGOT WHICH MANUFACTURES AN INGOT OF HIGH QUALITY WITHOUT THE DEGRADATION OF PRODUCTION YIELD

机译:硅锭的电子成型装置,其生产高质量的锭而不会降低产量

摘要

PURPOSE: An electronics molding device of a silicon ingot is provided to secure uniformity of a crystal of the transverse section of an ingot and to prevent the degradation of product yield.;CONSTITUTION: A radiation thermometer(16) is installed outside a monitoring window(15). The monitoring window is arranged to be faced to two sides(3a, 3b) which are parallel each other among fourth sides of an ingot(3). An insulating material(17) is inserted between the upper side of an after heater(9) and the lower side of a cooled crucible(7). A through hole(18a) is formed in a site which faces to a center part of each side of the ingot. A back mirror(19) is installed on the outer side of the through hole of the insulating material.;COPYRIGHT KIPO 2012
机译:用途:提供一种硅锭电子成型装置,以确保锭横截面的晶体均匀性并防止产品收率下降;组成:辐射温度计(16)安装在监控窗口的外部( 15)。监视窗被布置成面对晶锭(3)的第四侧面中彼此平行的两个侧面(3a,3b)。在后加热器(9)的上侧和冷却的坩埚(7)的下侧之间插入绝缘材料(17)。在面对铸锭的每一侧的中央部分的部位形成有通孔(18a)。在绝缘材料的通孔的外侧安装有后视镜(19)。;COPYRIGHT KIPO 2012

著录项

  • 公开/公告号KR20120024347A

    专利类型

  • 公开/公告日2012-03-14

    原文格式PDF

  • 申请/专利权人 SUMCO CORPORATION;

    申请/专利号KR20100134401

  • 发明设计人 KOYA HIROSHI;TAKEMURA YASUO;

    申请日2010-12-24

  • 分类号C30B29/06;C30B11/00;C01B33/021;H01L21/02;

  • 国家 KR

  • 入库时间 2022-08-21 17:10:26

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