ADIABATIC SECTION MOBILE SYSTEM CAPABLE OF IMPROVING THE QUALITY OF A SILICON SINGLE CRYSTAL INGOT AND A MANUFACTURING DEVICE OF A SILICON SINGLE CRYSTAL INGOT INCLUDING THE SAME

摘要

PURPOSE: An adiabatic section mobile system and a manufacturing device of a silicon single crystal ingot including the same are provided to maintain melt gap by descending a adiabatic section to the same speed as the surface of the silicon solution while the single crystal ingot grows.;CONSTITUTION: A heater heats a crucible(10). An adiabatic section is moveably installed in the crucible in order to cover the heat toward the single crystalline ingot(12). The crucible is installed in a chamber(1) and accepts silicon solution(11). A drive motor(181) supplies the power to the adiabatic section in order to relatively move the adiabatic section about the crucible.;COPYRIGHT KIPO 2011