METHOD FOR MANUFACTURING FLEXIBLE MULTILAYER TRANSPARENT ELETRODE

摘要

PURPOSE: A method for manufacturing a flexible multilayer transparent electrode is provided to control conductivity and transmittance of a multilayer transparent electrode by controlling partial pressure of argon gas or oxygen gas injected with a sputtering process. CONSTITUTION: A bottom oxide layer(120) is formed on a transparent substrate(110). A silver metal layer(130) is formed on the upper side of the bottom oxide layer. A top oxide layer(140) is formed on the upper side of the silver metal layer. The partial pressure of argon gas or oxygen gas is controlled in a sputtering process.