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Method for manufacturing flexible multilayer transparent eletrode
Method for manufacturing flexible multilayer transparent eletrode
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机译:柔性多层透明电极的制造方法
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摘要
PURPOSE: A method for manufacturing a flexible multilayer transparent electrode is provided to control conductivity and transmittance of a multilayer transparent electrode by controlling partial pressure of argon gas or oxygen gas injected with a sputtering process. CONSTITUTION: A bottom oxide layer(120) is formed on a transparent substrate(110). A silver metal layer(130) is formed on the upper side of the bottom oxide layer. A top oxide layer(140) is formed on the upper side of the silver metal layer. The partial pressure of argon gas or oxygen gas is controlled in a sputtering process.
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