MANUFACTURING METHOD OF A NANO-STRUCTURE AND AN ELECTRONIC DEVICE USING THEREOF CAPABLE OF IMPROVING LIGHT ABSORPTION EFFICIENCY OF A SOLAR BATTERY AND OPTICAL EXTRACTION EFFICIENCY OF A LIGHT EMITTING DIODE

摘要

PURPOSE: A manufacturing method of a nano-structure and an electronic device using thereof are provided to easily form a nano-cone by forming micro concave-convex structure on a substrate and form a desired shaped nano-structure at desired position on the substrate using a lithography process.;CONSTITUTION: A manufacturing method of a nano-structure comprises the following steps: forming micro concave-convex structure by etching surface of a substrate(100); evaporating metal catalyst(120) on the substrate in which the micro concave-convex structure(110) is formed; and forming a nano cone(130) by using a vapor-liquid-solid(VLS) method on the substrate in which the metallic catalyst is evaporated. A manufacturing method of an electronic device comprises the following steps: forming a p-n junction semiconductor layer by welding a p-type semiconductor layer and a n-type semiconductor layer; forming the micro concave-convex structure by etching at least one surfaces of the p-type semiconductor layer and the n-type semiconductor layer; evaporating a metallic catalyst on the semiconductor layer in which the micro concave-convex structure is formed; forming the nano cone using a vapor-liquid-solid(VLS) method on the semiconductor layer.;COPYRIGHT KIPO 2012