3D STANDING TYPE META MATERIAL STRUCTURE AND A MANUFACTURING METHOD THEREOF CAPABLE OF CONTROLLING AN ELECTROMAGNETIC PROPERTY

摘要

PURPOSE: A 3D standing type meta material structure and a manufacturing method thereof are provided to dynamically control transmission, reflection, and absorption properties by using MEMS(Micro-Electro-Mechanical System) and NIMS(Nano-Electro-Mechanical System) processes.;CONSTITUTION: A fixing unit(29) is fixed to a substrate(10). A resonator(20) includes the fixing unit and a plurality of arms. The fixing unit and the plurality of arms include conductive layers. One pair of arms(21,22) form a first split-ring. The first split-ring is vertical to the substrate. Another pair of arms form a second split-ring. The resonator includes a dielectric layer formed on the conductive layer.;COPYRIGHT KIPO 2012