FILM FORMING APPARATUS CAPABLE OF CREATING A REMOVABLE MOLYBDENUM LAYER IN A PATTERNING PROCESS USING A LASER SCRIBE METHOD, A FILM-FORMED SUBSTRATE MANUFACTURING METHOD, AND A FILM-FORMED SUBSTRATE

摘要

PURPOSE: A film forming apparatus, a film-formed substrate manufacturing method, and a film-formed substrate are provided to simplify a gas feed mechanism by forming pressure gradient using a single gas inlet part.;CONSTITUTION: A film forming apparatus(10) comprises film forming chambers(11A,11B) in which a material for forming a molybdenum layer is placed and a molybdenum layer is formed on a substrate and a pressure gradient forming unit which leads inert gas into the film forming chambers and forms pressure gradient for reducing the pressure of inert gas in the film forming chambers from a first pressure state to a second pressure state lower than the first pressure state. In the film forming chambers, a first film is formed at the first pressure state and a second film is formed after the pressure of inert gas is lowered to the second pressure state.;COPYRIGHT KIPO 2012