Measurement system on geometrical thickness and refractive index of materials using a pulse laser

摘要

The present invention relates to a system for measuring the thickness and refractive index of the material , in more detail , the pulse by using a laser light source , to a continuous wave laser light source and , techniques that can calculate the accuracy of the thickness and refractive index of the material at the same time higher than the calculated with a simple operation system using an infrared light source . ; this invention using the laser light from the light emitting part and the light irradiation section to provide a material with a pulsed laser thickness and refractive index measurement system at periodic intervals to the pulse shape of the laser for oscillating according to , measuring the interference signal of the test substance , and this analysis , is characterized in that the thickness and refractive index of the measurement substance constituting the spectrum analysis portion for calculating interference at the same time .