RF Metrology Characterization For Field Installation And Serviceability Of Plasma Processing Systems

摘要

This invention relates to a system for field replacement of the RF Measurement System . The system includes a sensor / cable bond , and analysis unit . Parameters of the RF measurement system are determined prior to placing the RF measurement system in the field . From these parameters , any one component , cable / sensor combination or analysis module is the system for the replacement unit can be replaced in the field by re- calibration . Such recalibration is performed by using the determined parameters before placing the RF measurement system in the field .