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Apparatus and Methed for Surface Plasmon Resonance Imaging Ellipsometry

机译:表面等离子体共振成像椭偏仪的装置和方法

摘要

the present invention is an imaging ellipsometer surface plasmon resonance and surface plasmon resonance method for imaging ellipsometry is. More specifically, the light-emitting P-wave to S-wave linearly polarized light which is a combination of, and phase delay to the emitted linearly polarized light to elliptically polarized light providing part provides the elliptically polarized incident light; The incident light is elliptically polarized light generated in the elliptically polarized light is incident first study, the polarization ellipse is the surface plasmon resonance by the incident light Here, the sample comprises a plasmon in the small intestine section, the reflected light is elliptically polarized light polarized incident light is reflected in accordance with the characteristics of the sample surface plasmon resonance sensor for release; The reflected light is incident and emitted from the plasmon resonance sensor, the reflected light to allow observation of the shape resonance condition, and plasmon resonance sensor of the detection means for detecting a sample; a surface plasmon resonance imaging ellipsometer comprising:.
机译:本发明是一种成像椭偏仪的表面等离振子共振和表面等离振子共振的方法,用于成像椭偏。更具体地,发光的P波到S波的线性偏振光是椭圆偏振的入射光的组合,并且相位延迟到发射的线性偏振光到椭圆偏振的光提供部分;入射光是椭圆偏振光产生的椭圆偏振光首先被入射,偏振椭圆是入射光引起的表面等离子体共振。这里,样品在小肠截面中包含等离子体激元,反射光是椭圆偏振光。偏振入射光根据样品表面等离振子共振传感器的特性反射以释放;反射光从等离振子共振传感器入射并发射,该反射光允许观察形状共振条件,以及用于检测样品的检测装置的等离振子共振传感器。表面等离子体共振成像椭圆仪,包括:

著录项

  • 公开/公告号KR101127210B1

    专利类型

  • 公开/公告日2012-03-29

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20090096641

  • 申请日2009-10-12

  • 分类号G01N21/27;G01N33/483;G01B11/24;

  • 国家 KR

  • 入库时间 2022-08-21 17:08:23

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