TUNGSTEN COATING LINER WHICH COMPOSES AN ARC CHAMBER INNER WALL OF ION IMPLANTATION EQUIPMENT, AND AN ARC CHAMBER OF THE ION IMPLANTATION EQUIPMENT USING THE SAME

摘要

PURPOSE: A tungsten coating liner and an arc chamber of ion implantation equipment using the same are provided to reduce edge cracks by increasing an edge coupling area of a tungsten coating layer through an edge rounding processing.;CONSTITUTION: Tungsten coating liners(500) composes an arc chamber inner wall of ion implantation equipment. The tungsten coating liners respectively comprise a square graphite plate(502) and a tungsten coating layer. An ion gas injection unit is formed in the center of the tungsten coating liner. The square graphite plate is rounded according to the upper edge. The tungsten coating layer is coated in the upper side of the graphite plate as constant thickness. The graphite plate comprises a recess(502a) in the upper side. The tungsten coating liner is inserted into the recess.;COPYRIGHT KIPO 2012