REGENERATING ARCH CHAMBER FOR AN ION IMPLANTING APPARATUS AND A METHOD FOR REGENERATING AN ARCH CHAMBER, CAPABLE OF FORMING A REGENERATING INNER-WALL ON THE INNER-WALL OF THE ARC CHAMBER

摘要

PURPOSE: A regenerating arch chamber for an ion implanting apparatus and a method for regenerating an arch chamber are provided to simplify a regenerating process using replaceable inner-wall part.;CONSTITUTION: A bottom part(111) and a sidewall part(112) are integrated to from an arc chamber. The inner-wall part of the arc chamber is damaged after a regenerating process, and the damaged inner-wall is cut. A regenerating inner-wall(115) is formed on the inner-wall of the arc chamber. A regenerating bottom(116) is formed on the bottom of the arc chamber. A metal coating layer(119) is formed on the regenerating inner-wall.;COPYRIGHT KIPO 2011