METHOD FOR ADJUSTING SELF-MAGNIFICATION OF A SCANNING ELECTRON MICROSCOPE CAPABLE OF DETERMINING AN OBJECT BY OBSERVING THE SAME WITH CONTINUOUS MAGNIFICATION

摘要

PURPOSE: A method for adjusting self-magnification of a scanning electron microscope is provided to measure the accurate size of an object by automatically adjusting the scanning electron microscope according to arbitrary magnification without feedback control.;CONSTITUTION: A focused control coefficient is calculated based on a correlation between an electronic objective lens and working distance(S101). A shape correction coefficient is calculated by revising the shape of an image according to the working distance after controlling the focus. An actual size coefficient is calculated after shape correction of the image. The coefficient of the functions becomes the database by determining equipment set values according to arbitrary magnification(S113). A zero point coefficient according to the working distance is calculated based on a distance correlation between a sample holding stage and the electronic objective lens.;COPYRIGHT KIPO 2012