AUTOMATIC SCANNING ANGLE ADJUSTMENT METHOD OF SCANNING ELECTRON MICROSCOPE AND SCANNING ELECTRON MICROSCOPE CAPABLE OF AUTOMATICALLY ADJUSTING SCANNING ANGLE

摘要

PROBLEM TO BE SOLVED: To provide an image rotation for automatically measuring rotation quantity of an image and automatically correcting a scanning direction in a scanning electron microscope. ;SOLUTION: In the scanning electron microscope composed of an electronic optical system composed of an electron gun 12, condenser lens 13, an electromagnetic deflector 14, and an objective lens 15, a sample chamber 2 storing a movable stage 21 and a secondary electron detection means, a control system 3 composed of electronic optical control system 31, and a display system 4, the microscope is provided with a rotation angle detection means 34 for detecting an rotation angle of a sample image based on the output of the secondary electron detection means and a deflection control means 35 for correcting a vertical deflection voltage to be applied to the electromagnetic deflector 14 based on the detected rotation angle.;COPYRIGHT: (C)1998,JPO