X-ray targets and its fabrication method for generation of coherent x-rays

摘要

PURPOSE: An x-ray target and a method for manufacturing the same are provided to generate coherent x-ray beams by forming an integrated type x-ray single mode source through a nano-channel formatting method. CONSTITUTION: A substrate is washed with acetone and distilled water. The substrate is mounted to a sputtering device. The sputtering device is formed into an ultra-high vacuum state. Argon gas is introduced into a vacuum chamber. A tungsten thin film is deposited to form a buffer layer. The thickness of the tungsten thin film is 200nm. An optical mask is arranged on the core(50) of a waveguide Beryllium is deposited to the core. The optical mask is eliminated.