Membrane comprising carbon nanotube for thin membrane transducer, manufacturing method for the same, and thin membrane transducer using the same

摘要

PURPOSE: A membrane containing a carbon nano-tube for a thin film transducer, a manufacturing method thereof, and a thin film transducer using the same are provided to enable bio sensing when biological active materials are coupled to each other at a carbon nano-tube. CONSTITUTION: A membrane containing a carbon nano-tube for a thin film transducer comprises a substrate(110) and a membrane(120). The substrate comprises an electrode. The membrane is separated from the substrate. The membrane comprises an insulation film and a metal film. The metal film is loaded on the insulation film and comprises a carbon nano-tube.