METHOD FOR MANUFACTURING A FREE-STANDING GALLIUM NITRIDE SUBSTRATE USING POLYCRYSTALLINE GALLIUM NITRIDE POWDER

摘要

PURPOSE: A method for manufacturing a free-standing gallium nitride substrate is provided to prevent a substrate from being bent and crack generation by manufacturing the free-standing gallium nitride substrate using polycrystalline gallium nitride substrate having similar thermal expansion coefficients.;CONSTITUTION: Polycrystalline gallium nitride powder deposited on a reactor or a susceptor is collected. The collected polycrystalline gallium nitride powder is put in a molding frame. A polycrystalline gallium nitride substrate is manufactured by sintering the polycrystalline gallium nitride powder. A single crystal gallium nitride layer letting single crystal gallium nitride grow is formed on the polycrystalline gallium nitride substrate.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Power collection step; (BB) Mounting step; (CC) Polycrystalline gallium nitride substrate manufacturing step; (DD) Single crystal gallium nitride layer forming step