Growth of Gallium Nitride Textured Films and Nanowires on Polycrystalline Substrates at sub-Atmospheric Pressures

摘要

Textured gallium nitride (GaN) films were grown on polished, polycrystalline and amorphous substrates in sub-atmospheric pressures, by direct nitradation of a thin molten gallium films using electron cyclotron resonance (ECR) microwave nitrogen plasma. C-plane texturing was achieved, independent of the substrate crystallinity. Single crystal quality GaN nanowires with diameters ranging from 40-50 nm were also synthesized using direct nitridation of thin gallium films with nitrogen plasma. Scanning electron microscopy (SEM), X-ray Diffraction (XRD), Energy Dispersive Spectroscopy (EDS) and Cross-sectional transmission electron microscopy (CS-TEM), high-resolution TEM (HRTEM) and Micro-Raman spectroscopy were used to characterize the synthesized gallium nitride films and GaN nanowires.