Micromechanical membrane device e.g. speaker device has silicon carbide membrane which is arranged opposite to upper and lower electrodes and is electrically isolated in movable membrane range by air gaps of upper and lower electrodes

摘要

The micromechanical membrane device has a lower electrode (E1) which is formed on the substrate (1), and silicon carbide membrane (M) is formed over the lower electrode. An upper electrode (E2) is formed over the membrane. The membrane opposite the upper and lower electrodes is electrically isolated in a movable membrane range (MA) by the air gaps (S1,S2) of the upper and lower electrodes. An independent claim is included for method for manufacturing micromechanical membrane device.