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Mems - microphone

机译:备忘录-麦克风

摘要

It measures that a cost-effective and space-saving realization of a component, the at least a mems - component (1) and at least one further semiconductor component (2) in a common housing (10) with at least one access opening (13), wherein in the front side of the mems - component (1) at least one membrane structure (3) is formed, which a cavity (4) in the rear side of the mems - component (1), and wherein the housing (10) comprises a carrier (11), on which the mems - component (1) is mounted.According to the invention, the mems - component (1) with its front side on the carrier (11) mounted so that a distance between the membrane structure (3) and the support surface is. The at least one further semiconductor component (2) is connected to the rear side of the mems - component (1), so that the mems - component (1) and the semiconductor component (2) form a stack of chips.
机译:它测量了在具有至少一个进入开口(10)的公共壳体(10)中的一种成本有效且节省空间的组件,至少一个记忆组件(1)和至少一个其他半导体组件(2)的实现。 13),其中在记忆体-组件(1)的前侧中形成至少一个膜结构(3),其中在记忆体-组件(1)的后侧中具有空腔(4),并且其中壳体(10)包括载体(11),在其上安装有记忆元件(1)。根据本发明,记忆元件(1)的前侧安装在载体(11)上,使得它们之间的距离为膜结构(3)和支撑表面是。所述至少一个另外的半导体部件(2)连接到所述存储器-部件(1)的背面,从而所述存储器-部件(1)和所述半导体部件(2)形成芯片堆叠。

著录项

  • 公开/公告号DE102011075260A1

    专利类型

  • 公开/公告日2012-11-08

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号DE20111075260

  • 申请日2011-05-04

  • 分类号B81B7/02;B81B3/00;H01L25/16;H04R19/04;

  • 国家 DE

  • 入库时间 2022-08-21 17:04:53

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