首页> 外国专利> Method for manufacturing high voltage component e.g. N-channel metal oxide semiconductor transistor, in mobile telephone, involves forming connection to field structure, and coupling connection with potential distributing field in substrate

Method for manufacturing high voltage component e.g. N-channel metal oxide semiconductor transistor, in mobile telephone, involves forming connection to field structure, and coupling connection with potential distributing field in substrate

机译:制造高压部件的方法,例如移动电话中的N沟道金属氧化物半导体晶体管涉及形成与场结构的连接,以及将连接与基板中的电位分布场耦合

摘要

The method involves providing a substrate (105) e.g. silicon substrate, with a component region e.g. source region, gate region and drain region. The substrate is provided with gate layers located on an upper surface of the substrate. The gate layers are patterned for creating gates in the gate region. A field structure (160) is located on the upper surface of the substrate, where the structure surrounds the drain region. A connection to the structure is formed and coupled with potential, which distributes an electric field in the substrate between sides of the gates and the drain region. An independent claim is also included for a component comprising a substrate.
机译:该方法涉及提供衬底(105),例如衬底。硅衬底,具有例如源极区,栅极区和漏极区。基板设置有位于基板的上表面上的栅极层。图案化栅极层以在栅极区域中形成栅极。场结构(160)位于衬底的上表面上,其中该结构围绕漏极区域。形成到该结构的连接并与电势耦合,该电势将电场分布在栅极侧和漏极侧之间的基板中。对于包括衬底的部件也包括独立权利要求。

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