INORGANIC POWDER FOR AEROSOL DEPOSITION METHOD, AND METHOD OF MANUFACTURING INORGANIC FILM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide film forming raw powder that increase a supply speed of the powder and stabilizes supply of the powder when used for an aerosol deposition method.;SOLUTION: There is provided inorganic powder used as a film forming raw material for an aerosol deposition method, wherein the inorganic powder includes a plurality of inorganic particles made of ceramics and/or metals, and Carr's flowability index is 0-23.;COPYRIGHT: (C)2013,JPO&INPIT