METHOD FOR CONTROLLING MEMS MIRROR DEVICE, AND MEMS MIRROR DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress the occurrence of a pull-in phenomenon to increase a turning angle around a major axis of a mirror.;SOLUTION: A MEMS mirror device includes a mirror, a first movable cantilever beam having one end connected to one side of the mirror via a connection spring, second and third movable cantilever beams each of which has one end connected to the other side of the mirror via a connection spring, fixed electrodes 107-1 to 107-3 arranged apart from the first, second, and third movable cantilever beams, and a controller. The controller includes: a computing unit 10 which calculates a bias voltage in accordance with a control variable designating a desired turning state of the mirror and calculates an application voltage to be applied to the fixed electrodes 107-1 to 107-3, from the control variable and the bias voltage; and a voltage generator 12 which applies the application voltage to the fixed electrodes 107-1 to 107-3. The computing unit 10 varies the bias voltage dependently on the control variable designating a turning state of the mirror.;COPYRIGHT: (C)2013,JPO&INPIT