MEMS MEMS Driving Method for MEMS Mirror Scanner and Driving Device for MEMS Mirror Scanner using the method thereof

摘要

The present invention relates to a MEMS mirror scanner driving method in which a mirror can rotate around an x-axis and a y-axis perpendicular to the same. The method comprises the steps of: obtaining a transfer function (T (f)) of a MEMS mirror scanner; setting a target time series output signal (d(t)) for mirror driving of the MEMS mirror scanner; converting the target time series output signal (o(t)) into an output signal (D(f)) of a Fourier target frequency domain; obtaining an input signal (V(f)) of a frequency domain from the target frequency domain output signal (D(f)) and the transfer function (T(f)) of the MEMS mirror scanner; converting the input signal (V(f)) of the frequency domain into a time series input signal (v(t)); and applying the time series input signal (v(t)) as a driving voltage to the MEMS mirror scanner. The present invention can effectively suppress unwanted residual vibration appearing in an output.