MIXED SINGLE CRYSTAL WAFER OF SELF-STANDING Mg-CONTAINING ZnO SYSTEM AND METHOD FOR MANUFACTURING MIXED SINGLE CRYSTAL OF Mg-CONTAINING ZnO SYSTEM USED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a mixed single crystal wafer of a self-standing Mg-congtaining ZnO system with a high composition uniformity including Li mixed as an impurity, and to provide a method for manufacturing the same.;SOLUTION: ZnO and MgO being solutes are mixed and melted, thereafter a seed crystal substrate 7 is brought into direct contact with the obtained melt 8, an Mg-containing ZnO system mixed crystal single crystal is grown by a liquid phase epitaxial growing method by continuously or intermittently pulling up the seed crystal substrate 7, thereafter the substrate 7 is removed by grinding or etching, a (-c)-face side in which the single crystal is liquid phase epitaxially grown is gound or etched, thus obtaining the mixed single crystal of a self-standing Mg-containing ZnO system.;COPYRIGHT: (C)2013,JPO&INPIT