Thin film solar cell manufacturing method and thin film solar cell manufacturing laser processing apparatus

摘要

Disclosed is a laser processing apparatus (1) which is provided with a laser head (31), measuring apparatuses (11, 21), and a control apparatus (80). On one side of the laser head (31), the measuring apparatus (11) is disposed, and on the other side of the laser head, the measuring apparatus (21) is disposed. When the laser head (31) moves to said side with respect to the second layer on a substrate (100), at a position ahead of the laser head (31) in the moving direction of the laser head, the measuring apparatus (11) measures the positional information of a first processing line, and when the laser head (31) moves to the other side, at a position ahead of the laser head (31) in the moving direction of the laser head, the measuring apparatus (21) measures the positional information of the first processing line. The control apparatus (80) controls the irradiation position of a laser beam on the basis of the positional information. A second processing line is formed on the second layer along the first processing line. With the laser processing apparatus (1), the processing lines are formed at predetermined intervals, without deteriorating production efficiency, on each of the layers formed on the substrate by having the processing lines not overlap each other.