And a method for manufacturing a device having a device piezo-resistive means for detecting the displacement of the beam and the beam which is suspended

摘要

And a method for manufacturing the device and the device has a piezo-resistive means for detecting the displacement of the beam and the beam is suspended. (14), is stretched by a part (16), not in a straight line with one another beam that moves parallel to the plane of the support, the device displacement detection, including the (20, 22) piezoresistive strain gauges of at least two I include (18) means. Beam is suspended through the detection means. In accordance with the present invention, two gauges are placed on opposite sides of the two beams, respectively.