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MANUFACTURING METHOD OF QUANTUM DOT STRUCTURE, QUANTUM DOT STRUCTURE, SEMICONDUCTOR DEVICE, AND MANUFACTURING DEVICE OF QUANTUM DOT STRUCTURE
MANUFACTURING METHOD OF QUANTUM DOT STRUCTURE, QUANTUM DOT STRUCTURE, SEMICONDUCTOR DEVICE, AND MANUFACTURING DEVICE OF QUANTUM DOT STRUCTURE
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机译:量子点结构的制造方法,量子点结构,半导体装置以及量子点结构的制造装置
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摘要
PROBLEM TO BE SOLVED: To provide new means capable of controlling an arrangement pattern of quantum dots and forming a quantum dot layer without requiring many man-hours.;SOLUTION: The manufacturing method of a quantum dot structure comprises the steps of: irradiating a laser beam of a pattern corresponding to an arrangement pattern of quantum dots onto a source film 25b formed with a thin film of a quantum dot material; releasing micro droplets 26 of the quantum dot material from a region irradiated by the laser beam; fixing the micro droplets 26 of the quantum dot material to a substrate 30 arranged oppositely to the source film 25b; and forming a plurality of quantum dots on the substrate 30 in the arrangement pattern.;COPYRIGHT: (C)2013,JPO&INPIT
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