Operational method of the capacitance type micro mechanical sensor which has analog reset, and circuit constitution null for the above-mentioned capacitance type micro mechanical sensor

摘要

The present invention relates to a circuit arrangement and method for operating a capacitive micro-mechanical sensor. Two fixed electrodes and (E1 · E2), formed the center electrode of one of the displaceable movable by a (E0) by an external force, capacitive micromechanical sensor, having a differential variable capacitor of at least one It has been, displacement of the center electrode is measured. In accordance with the present invention, acting on the center electrode, to compensate for the ratio of the force corresponding to the electrostatic restoring force. Operating in a closed loop and the sensor, the read signal, affects the reset crosstalk signal through the controller, it acts restoring force of capacitive caused thereby against the displacement of the center electrode so as to compensation. Here, it is described the two embodiments of the present invention, and for a complementary method for optimizing the control.