Sample storage cell for X-ray microscope, X-ray microscope, and observation method of X-ray microscope image

摘要

A sample support member (11) is provided with a metal film (11b) which emits characteristic X-rays in a wavelength range of 0.6 to 6.0 nm including the "water window" region when an electron beam strikes the metal film (11b) and which is provided on one main surface of a sample support film (11a) which is a silicon nitride film or a carbon film. Characteristic X-rays in the soft X-ray region are emitted with high efficiency (high intensity) from the metal film (11b) which the electron beam has struck. Since the high-intensity characteristic X-rays strike the sample (10), the SN ratio of the observation image is improved. Since th metal film (11b) has an effect of minimizing the range where electrons are diffused in the sample support film (11a), the damage to the sample is reduced. Further, since the acceleration voltage of the incident electron beam can be increased, the metal film (11b) has also an effect of improving the resolution.