Non Destructive 3D X-Ray Imaging of Nano Structures & Composites at Sub- 30 NM Resolution, With a Novel Lab Based X-Ray Microscope; Conference paper

摘要

In this article we describe a 3D x-ray microscope based on a laboratory x-ray source operating at 2.7, 5.4 or 8.0 keV hard x-ray energies. X- ray computed tomography (XCT) is used to obtain detailed 3D structural information inside optically opaque materials with sub-30 nm resolution. Applications include imaging internal 3D arrays of nanostructures of smart materials, polymer nanocomposites, porosity and structural imaging within fuel cells; understanding the internal workings of nanosensors, imaging of whole hydrated cells and tissues; non destructive reverse engineering and failure analysis of semiconductor circuitry and MEMs devices.