Manufacturing method of back electrode type solar cell, back electrode type solar cell and back electrode type solar cell module

摘要

A method for producing a back electrode type solar cell (1, 16) including the steps of forming a light-receiving surface diffusion layer (6) and an anti-reflection film (7, 12) by applying, to a light-receiving surface of a silicon substrate (4), a solution (27) containing a compound containing an impurity identical in conductivity type to the silicon substrate (4), a titanium alkoxide, and an alcohol, followed by heat treatment, and forming a light-receiving surface passivation film (8) on the light-receiving surface of the silicon substrate (4) by heat treatment; a back electrode type solar cell (1, 16) including a light-receiving surface diffusion layer (6), and an anti-reflection film (7) on the light-receiving surface diffusion layer (6), made of titanium oxide containing an impurity identical in conductivity type to a silicon substrate (4); and a back electrode type solar cell module (35) including the back electrode type solar cells (1, 16).