Inspection conditional configuration manner and the survey instrument in the nonuniformity survey instrument of periodicity pattern

摘要

P To provide an optimal inspection condition setting method in an irregularity inspection apparatus for acquiring images for accurately distinguishing between normal parts and varied parts ON the basis of contrast by diffracted light. PSOLUTION: The method for setting inspection conditions of the irregularity inspection apparatus which irradiates illumination light at a plurality of irradiation angles to a substrate in which a periodic pattern is formed to perform inspection through the use of diffracted light generated by the periodic pattern includes: a process for inputting information ON substrates to be inspected for inputting information ON the shape of the periodic pattern; a positioning process; a process for computing the peak angle of the intensity of diffracted light by grating equations; a process for determining the range of measuring angles of diffracted light and determining the range of measuring angles when diffracted light is measured; a process for acquiring the intensity of diffracted light and acquiring a profile of the intensity of diffracted light; and an inspection condition setting process for setting the irradiation angles of the illumination light, imaging magnification, and the wavelength of the illumination light ON the basis of an acquired profile of the intensity of diffracted light, the angle of diffracted light acquired in the process for computing the peak angle of the intensity of diffracted light, the order of the diffracted light and the wavelength of the illumination light. PCOPYRIGHT: (C)2010 and JPO& INPIT