Back surface field type heterojunction solar cell and manufacturing method thereof

摘要

The back-surface-field type of heterojunction solar cell according to the present invention comprises a crystalline silicon substrate of a first conductivity type, an intrinsic layer and an amorphous silicon layer of the first conductivity type which are laminated in sequence on the front surface of the substrate, an anti-reflective film laminated on the amorphous silicon of the second conductivity type, junction regions of the first conductivity type and junction regions of the second conductivity type which are formed to a predetermined depth on the inside of the substrate from the rear surface of the substrate, and first-conductivity-type electrodes and second-conductivity-type electrodes which are respectively provided on the junction regions of the first conductivity type and the junction regions of the second conductivity type; wherein the first-conductivity-type electrodes and the second-conductivity-type electrodes are disposed alternately.