Reticule conveyer and exposure device, reticule conveying manner, treatment manner, and device production manner of reticule

摘要

There is provided a reticle transport apparatus which is capable of preventing any foreign matter from adhering to a reticle. A reticle transport apparatus 4, which transports a reticle with respect to a processing atmospheric chamber 3, includes a reticle loading mechanism 4 which loads the reticle into a processing atmosphere chamber 3, at least a region of the reticle in which a pattern is formed being covered by a cover; a cover unloading mechanism 4 which unloads and out of the processing atmosphere chamber 3, the cover separated from the reticle after the reticle has been transported by the reticle loading mechanism 4; and a cover cleaning mechanism 10 which cleans the cover unloaded by the cover unloading mechanism 4.