Electron beam application device capable of high-resolution and high-contrast observation

摘要

PROBLEM TO BE SOLVED: To provide an objective lens, capable of obtaining an image with higher resolution and higher contrast than the conventional images.;SOLUTION: An electromagnetic superposition type objective lens includes a magnetic path that encloses a coil, a cylindrical or conical booster magnetic path that surrounds an electron beam, a control magnetic path fitted between the coil and a sample, an accelerating electric field control means of the electron beam by a booster power supply, a decelerating electric field control means for the electron beam by a stage power supply, and a suppression unit of electric discharge of the sample by a control magnetic path power supply. Thus, over a wide landing energy range, the electron beams can be focused with the electromagnetic superposition type objective lens placed close to the sample.;COPYRIGHT: (C)2010,JPO&INPIT