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Production method of the semiconductor memory element which possesses the storage node and that storage node and the semiconductor memory element which improves the quality of the storage node
Production method of the semiconductor memory element which possesses the storage node and that storage node and the semiconductor memory element which improves the quality of the storage node
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机译:具有该存储节点和该存储节点的半导体存储元件的制造方法以及提高该存储节点的质量的半导体存储元件
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摘要
A storage node, a method of fabricating the same, a semiconductor memory device and a method of fabricating the same is provided. The method of fabricating a storage node may include forming a lower electrode, forming an irradiated data storage layer and forming an upper electrode.
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