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The approach place exposure device, approach place exposure method and formation method of resist pattern, the mask basic material which
The approach place exposure device, approach place exposure method and formation method of resist pattern, the mask basic material which
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机译:接近放置曝光装置,接近放置曝光方法和抗蚀剂图案的形成方法,掩模基材
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摘要
PROBLEM TO BE SOLVED: To provide a near-field exposure mask capable of ensuring intimate contact between the mask and an object to be exposed in a large area by a simple mechanism even when waving is present in the object substrate to be exposed, and to provide a near-field exposure apparatus and a near-field exposure method.;SOLUTION: The near-field exposure mask includes a light blocking film 102 having an opening 103 smaller than a wavelength of exposure light, and a mask base material 101 holding the light blocking film, and is configured and positioned to effect exposure of an object to be exposed to near-field light generated corresponding to the opening during contact thereof with the object to be exposed. The mask base material comprises a synthetic resin material transparent to the exposure light and having Young's modulus in a range from 1 GPa to 10 GPa.;COPYRIGHT: (C)2008,JPO&INPIT
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