The treatment section which treats the substrate the substrate central processing unit, making use of the record media null liquid medicine where the computer program in order to run substrate treatment

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of improving the treatment efficiency of a substrate by reducing the dissolved oxygen of a chemical, and improving reliability.;SOLUTION: This substrate treatment device 1 includes a treatment part 10 for treating a substrate W, a chemical storage container 20 for storing the chemical, a chemical supplying drive part 23 for supplying the chemical from the chemical storage container 20 to the treatment part 10, a circulation line 30 for circulating the chemical stored in the chemical storage container 20, and a mixture generation part 31 provided on the circulation line 30. An inert gas is supplied to the mixture generation part 31 by an inert gas supply source 40. The mixture generation part 31 mixes the chemical supplied from the chemical storage container 20 and the inert gas supplied from the inert gas supply source 40 to generate a gas-liquid mixture.;COPYRIGHT: (C)2011,JPO&INPIT