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Piezoelectric thin film, piezoelectric body and manufacturing method thereof, and piezoelectric resonator, actuator element, and physical sensor using the piezoelectric thin film
Piezoelectric thin film, piezoelectric body and manufacturing method thereof, and piezoelectric resonator, actuator element, and physical sensor using the piezoelectric thin film
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机译:压电薄膜,压电体及其制造方法,以及使用该压电薄膜的压电谐振器,致动器元件和物理传感器
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摘要
A piezoelectric thin film is provided to reduce the power consumption and miniature the RF-MEMS device using the aluminium nitrate membrane contains the scandium. An aluminium nitrate membrane contains the scandium. When the total amount of the atom number of the aluminium nitrate membrane and the scandium is 100 atom %, the inclusion rate of the scandium is in range of 0.5~50 atom %. The aluminium nitrate membrane is installed on the top of the substrate. At least one layer of the intermediate layer is installed between the aluminium nitrate membrane and the substrate.
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